Techniques and considerations in the microfabrication of Parylene C microelectromechanical systems
Published in Micromachines, 2018
Recommended citation: Jessica Ortigoza-Diaz, Kee Scholten, Christopher Larson, Angelica Cobo, Trevor Hudson, James Yoo, Alex Baldwin, Ahuva Weltman Hirschberg, Ellis Meng. (2018). "Techniques and considerations in the microfabrication of Parylene C microelectromechanical systems." Micromachines. 9(9).
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